Synthesis and characterization of A-Si coatings on a polyimide substrate

Synthesis and characterization of A-Si coatings on a polyimide substrate Full article

Conference

II International Scientific Conference “Industrial and Civil Construction 2022”
18-19 Jan 2022 , Белгород

Journal

AIP Conference Proceedings
ISSN: 0094-243X , E-ISSN: 1551-7616

Output data

Year: 2023, Volume: 2758, Number: 1, Article number : 020002, Pages count : 1 DOI: 10.1063/5.0131006

Authors

Cherkashina N.I. ¹ , Pavlenko V.I. ¹ , Shurshakov V.A. ² , Sidelnikov R.V. ¹

Affiliations

1	Belgorod State Technological University named after V.G. Shukhov, Kostyukov str., 46, Belgorod, 308012, Russia
2	Institute of Biomedical Problems RAS, Khoroshevskoe shosse, 76 A, Moscow, 123007, Russia

The paper presents data on the deposition of a silicon-based ceramic coating on a flexible polyimide substrate. A PMA 40 grade polyimide film was used as the polyimide substrate. A thin Si film was deposited on the polyimide film by radio-frequency (RF) magnetron sputtering at a frequency of 13.56 MHz. The application was carried out on the installation "Nika 2012". A pure silicon target was mounted on a water-cooled magnetron connected to an RF generator (13.56 MHz). In the RF mode, a Si target was sputtered at a discharge power of 490 W and a discharge current of 1 A. The resulting silicon coating on a polyimide substrate was studied using X-ray phase analysis, scanning electron microscopy, and energy dispersive analysis. The resulting Si coating has a pronounced amorphous structure. The X-ray shows an amorphic halo at an angle of 22-23°. The structure of the obtained a-Si coating is a granular (spongy) surface; a-Si coating consists of metallic crystallites. The thickness of the deposited ceramic coating is practically the same along the entire length of the surface and is ∼209 nm.

Cherkashina N.I. , Pavlenko V.I. , Shurshakov V.A. , Sidelnikov R.V.
Synthesis and characterization of A-Si coatings on a polyimide substrate
AIP Conference Proceedings. 2023. V.2758. N1. 020002 :1-1. DOI: 10.1063/5.0131006 Scopus РИНЦ OpenAlex

Published print:	May 24, 2023
Published online:	May 24, 2023

Scopus:	2-s2.0-85161020369
Elibrary:	54019868
OpenAlex:	W4377971038

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